|
Note
|
Ref. System
|
Title
|
|
2-00-100
|
Graphites
|
Graphite Specifications
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|
2-02-109
|
9500 and xR
|
Applied Materials 9500 and xR Series IHC A/C Liner Configurations
|
|
2-02-110
|
9500 and xR
|
Applied Materials 9500 and xR Series Bernas A/C Liner Configurations
|
|
2-02-111
|
9500 and xR
|
Applied Materials 9500 and xR Series Frontal Filament Bernas
|
|
2-02-115
|
9500 and xR
|
Applied Materials 9500 and xR Series Electrode Configurations
|
|
2-02-116
|
9500 and xR
|
Applied Materials 9500 and xR Series Removable Pin Electrode Mounts
|
|
2-02-140
|
9500 and xR
|
Applied Materials 9500 and xR Series MRS Vanes
|
|
2-05-115
|
GSD
|
Axcelis GSD Repeller Configurations
|
|
2-05-116
|
GSD
|
Axcelis GSD Cathodes
|
|
2-05-125
|
GSD
|
Axcelis GSD Arc Chamber Liners (ELS)
|
|
2-05-130
|
GSD
|
Axcelis GSD ELS2 Cathode Assembly
|
|
2-05-135
|
GSD
|
Axcelis GSD Reversible Cathode Support Plates
|
|
2-05-140
|
GSD
|
Axcelis GSD No Hole Repellers
|
|
2-05-145
|
GSD
|
Axcelis GSD Bias Aperture Insulator (EMER) Upgrade
|
|
2-05-150
|
GSD
|
Axcelis GSD Arc Slits
|
|
2-05-155
|
GSD
|
Axcelis GSD ELS2 Filament Clamps
|
|
2-05-160
|
GSD
|
Axcelis GSD ELS2 "Ideal" E/G-Modified Liner Sources
|
|
2-08-100
|
E220/E500
|
Varian E220/E500 A/C, Insulator, and Filament Screw Configurations
|
|
2-08-102
|
E220/E500
|
Varian E220/E500 A/C, Liner Chamber, Info & Installation Instructions
|
|
2-12-100
|
VIISion/VIISta
|
Varian Modified Repeller Assembly
|
|
2-12-105
|
VIISion/VIISta
|
Varian Solid VIISion & VIISta 810 Liner Source
|
|
2-12-110
|
VIISion
|
Varian Modified Beam Dump
|
|
2-12-120
|
VIISion/VIISta
|
Varian Solid VIISion/VIISta 810 Replacement Liners for use with Standard Arc
Chamber Top Plate
|
|
2-16-150
|
TEL
|
TEL ECLIPSE/SOLARIS Series Bearing Latch
|
